郭穎教授
從事低溫等離子體物理基礎(chǔ)及應(yīng)用研究,主要包括等離子體源技術(shù)及其診斷和數(shù)值模擬、均勻穩(wěn)定的低溫等離子體源設(shè)備、等離子體在物質(zhì)界面中的作用等,參與工業(yè)用等離子體去膠、刻蝕、沉積設(shè)備的開發(fā)設(shè)計(jì)、模擬計(jì)算、改進(jìn)及檢測(cè)診斷等。在Plasma Sources Science and Technology、Applied Physics Letters、ACS Applied Materials & Interfaces 等發(fā)表論文三十多篇。主持國家自然科學(xué)青年基金及面上基金3項(xiàng),主持與美國March等公司合作設(shè)備開發(fā)項(xiàng)目等。
研究方向:
1、 等離子體源技術(shù)、診斷及理論和數(shù)值模擬;
2、 等離子體與材料相互作用(超疏水抗菌纖維制備、碳纖維表面處理);
3、 面向半導(dǎo)體加工設(shè)備的等離子體技術(shù)(等離子體氮化/氧化設(shè)備,高選擇比自由基刻蝕設(shè)備,等離子體增強(qiáng)型爐管ALD設(shè)備);
4、 寬禁帶半導(dǎo)體材料的在線缺陷檢測(cè)技術(shù)研究。
近年來承擔(dān)的主要科研項(xiàng)目:
1. 國家自然科學(xué)基金面上項(xiàng)目,12175036,大氣壓耦合放電射流及其制備自修復(fù)抗菌纖維表面研究,2022/01-2025/12,主持
2. 上海車儀田科技有限公司,高效等離子體臭氧發(fā)生器開發(fā),2023/12-2025/01,主持
3. 上海稷以科技有限公司,爐管設(shè)備物理場(chǎng)及等離子體放電場(chǎng)的模擬及診斷,2023/11-2025/11,主持
4. 上海稷以科技有限公司,高密度等離子體源開發(fā),202105-202305,已結(jié)題,主持
5. 國家自然科學(xué)基金面上項(xiàng)目,11475043,常壓脈沖協(xié)同射頻輝光等離子體放電過程及其薄膜聚合沉積研究,2014/01-2018/12已結(jié)題,主持
6. 國家自然科學(xué)基金青年基金項(xiàng)目,11005017,高密度低溫二次電子輔助脈沖射頻等離子體及柔性電子基板表面改性,2011/01-2013/12,已結(jié)題,主持
7. 與諾信-March公司合作,低氣壓低溫等離子體研究以及相關(guān)技術(shù)領(lǐng)域的應(yīng)用開發(fā),2013/07-2017/06,已結(jié)題,主持
近年來發(fā)表的代表性論著、專利:
論文
1. Zhiduan Liu,Lili Gu,Junlin Fang,Shaofeng Xu,Ying Guo*,Jianjun Shi,Penetration of ionization wave through dielectric microhole in atmospheric pulsed discharges,Applied Physics Letters,2025,126,044101
2. Ying Tian,Yongyin Kang,Zhao Xu,Shaofeng Xu,Dan Yu,Wei Wang,Jianjun Shi,and Ying Guo* ,Dynamic fluorescence via manipulation of surface wrinkling in polyester fabrics,Applied Surface Science, 2025,685,162036
3. Guo Ying,Guo Xuanying,Xu Shaofeng,Shi Jianjun,Estimation of total forces of jets on liquid interfaces using image processing methods,JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2024,57,245206
4. Ying Tian,Shaofeng Xu,Wei Wang, Dan Yu,Jianjun Shi and Ying Guo?,Modelling and preparation of composite wrinkled structures on polyester fabric via plasma treatment,JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2024,57,235301
5. Tian Ying, Xu Shaofeng,Zhang Hao,Wang Wei,Yu Dan, Shi Jianjun,and Guo Ying?, Superhydrophobic wrinkled structures constructed on polyester fabrics treated by plasma, PLASMA PROCESSES AND POLYMERS,2024,21,e2300137
6. Yarong Zhang, Ying Guo*; Asymmetrical ignition of radio frequency discharge in atmospheric pressure cascade glow discharges, Plasma Sources Science and Technology, 2023, 32
7. Chenzi Lu; Ying Guo*; Manipulating the propagation of ionization wave by pulsed electrical potential in atmospheric plasma jet, Applied Physics Letters, 2023, 123(11): 114104-1-5
8. Lili Gu; Yarong Zhang; Ying Guo*; Dynamics of dielectric micropore discharge in atmospheric pulsed dielectric barrier discharge, Physics of Plasmas , 2023, 30(10)
9. Peiru Zhang; Lili Yang; Ying Guo*,Underwater Highly Pressure-Sensitive Fabric Based on Electric-Induced Alignment of Graphene, Materials,2023,16(4):1567.
10. Liyun Xu; Zhao Xu; Jianjun Shi; Ying Guo*; Earthworm-Inspired Ultradurable Superhydrophobic Fabrics from Adaptive Wrinkled Skin, ACS Appl. Mater. Interfaces, 2021, 13: 6758-6766
11. Qianhan HAN, Chenyu WU, Ying GUO* and Jianjun SHI,Temporal evolution of atmospheric cascade glow discharge with pulsed discharge and radio frequency discharge,Plasma Sci. Technol. 22 (2020) 034014;
12. Ying Guo, Zhengming Shi, Qianhan Han, Chenyu Wu, Jing Zhang, and Jianjun Shi, Dependence of discharge ignition on initial condition in atmospheric cascade glow discharges,AIP Advances, 10, 035006 (2020);
13. Liyun Xu,Ying Guo*, Liu Liu, Guanghui Baid, Jianjun Shi, Lu Zhang, Xijiang Chang,Ruiyun Zhang Jing Zhang, Jianyong Yu,Fabrication of fluorine-free, comfortable and wearable superhydrophobic fabrics via capacitance coupled plasma with methyl side-chain lauryl methacrylate coatings,Progress in Organic Coatings 146 (2020) 105727
14. Chengxian PAN, Zhengming SHI , Qianhan HAN,Ying GUO* and Jianjun SHI ,Numerical simulation of atmospheric pulsemodulated radio-frequency glow discharge ignition characteristics assisted by a pulsed discharge, Plasma Sci. Technol. 22,015405, (2020)
15. Guo, Y., Q. H. Han, X. D. Wang, and J. J. Shi. Injection of Plasma Plume into Radio Frequency Atmospheric Pressure Glow Discharge.. PHYSICS OF PLASMAS, 2017, 24, (7)
16. Zhang, J., Y. Guo, X. J. Huang, J. Zhang, and J. J. Shi. Operation Mode on Pulse Modulation in Atmospheric Radio Frequency Glow Discharges.. Plasma Science & Technology , 2016, 18,(10), 974-977.
17. Xiaojiang Huang, Ying Guo*; Jing Zhang; Yoshitaka Nakano; Hideo Sugai; Keiji Nakamura, In situ monitoring of GaN substrate surface in ICP containing energetic electrons, Applied Surface Science, 2014, 292,387– 389
18. Yanfeng Xie, Ying Guo*, The Effects of Contents of Oxygen in Argon-oxygen Mixed Gas on Polyethylene Terephthalate (PET) Films by CCP Discharge,2012 International Conference on Engineering Materials,Advanced Materials Research, 2013,651, 257-262.
19. Ying Guo, Jing Zhang et al,Growth of Single-Crystalline Nanorods in Atmospheric Plasma, Jpn. J. Appl. Phys. 2011, 50 , 01AH04
20. Ying Guo, Keiji Nakamura, Jing Zhang, Yoshitaka Nakano, and Hideo Sugai,Observation of Optical Fluorescence of GaN Thin Films in an Inductively-CoupledPlasma Containing High Energy Electrons,Jpn. J. Appl. Phys. 2011, 50,01AA02
21. Ying Guo Jing Zhang Jinzhou Xu Jianyong Yu,Variable Morphology of PTFE-Like Polymer Nanocrystals Fabricated by Oriented Plasma Polymerization at Atmospheric Pressure, Applied Surface Science,254/11 ,2008, 3408-3411
22. Ying Guo, Jing Zhang, Feng Zhu, ZhongXue Yang, Jinzhou Xu, Jianyong Yu,Self-Assembly of β-Ga2O3 nanobelts,Applied Surface Science, 254 ,2008, 5124–5128
23. Jinzhou Xu, Ying Guo, Lei Xia, Jing Zhang,Discharge transitions between glow-like and filamentaru in a xenon/chlorine-filled barrier discharge lamp, PLASMA SOURCES SCIENCE&TECHNOLOGY, 16 (2007),488-453
24. HE Tao, GUO Ying, ZHANG Jing,Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane,Plasma Science and Technology, 10/6, 2008, 706-709
25. J. Zhang, Y. Guo, J. Z. Xu, X. S. Fang, and H. K. Xie,D. L. Shi, P. He, and W. J. van Ooij , Single-crystalline polytetraflfluoroethylene-like nanotubes prepared from atmospheric plasma discharge, APPLIED PHYSICS LETTERS 86, 131501 ,2005
主要學(xué)術(shù)兼職:
1. 中國電工技術(shù)學(xué)會(huì)等離子體及應(yīng)用專委會(huì)委員(第一屆2016-2020,第二屆2021-2025)
2. 中國力學(xué)學(xué)會(huì)等離子體科學(xué)與技術(shù)專委會(huì)秘書 (第七2015-2019、八屆2020-2024)
國際交流與合作:
2009.4-2010.4 日本中部大學(xué)電氣工程系 訪問學(xué)者
聯(lián)系電話:021-67792090-557 E-MAIL:guoying@dhu.edu.cn